Accuracy Consideration for Dielectric Measurements of Semiconductor Wafers Using Free Space Microwave Measurement System in 8-13 GHz Range

AWANG, ZAIKI BIN (2004) Accuracy Consideration for Dielectric Measurements of Semiconductor Wafers Using Free Space Microwave Measurement System in 8-13 GHz Range. In: UNSPECIFIED.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
PRISMA ID:	2212
URI:	http://oarr.uitm.edu.my/id/eprint/17198

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