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Effects of target surface oxidation on crystallization of YSZ film deposited by reactive sputtering on glass substrate

HERMAN, SUKREEN HANA BINTI (2007) Effects of target surface oxidation on crystallization of YSZ film deposited by reactive sputtering on glass substrate. In: UNSPECIFIED.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
PRISMA ID: 23416
URI: http://oarr.uitm.edu.my/id/eprint/25176

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