Optical and Structural Characteristics of Annealed a-CNx Films Grown by Surface Wave MP-CVD

MAHMOOD, MOHAMAD RUSOP BIN (2007) Optical and Structural Characteristics of Annealed a-CNx Films Grown by Surface Wave MP-CVD. Science Links Japan. ISSN 1394-1763

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Item Type:	Article
Journal or Publication Title:	Science Links Japan
PRISMA ID:	7315
URI:	http://oarr.uitm.edu.my/id/eprint/2881

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