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Composition dependence of polycrystalline quality of YSZ thin film deposited on a glass substrate by reactive sputtering

HERMAN, SUKREEN HANA BINTI (2010) Composition dependence of polycrystalline quality of YSZ thin film deposited on a glass substrate by reactive sputtering.

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Item Type: Article
PRISMA ID: 27599
URI: http://oarr.uitm.edu.my/id/eprint/5844

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