Smart control sampling system for metrology tool in semiconductor production line
This research is to implement a Smart Control Sampling (SCS) system for metrology tool in the Semiconductor industry factory for better traceability and dynamic control on quality sampling for wire bond proces. Wire Bond process is one of the most critical process in the overall assembly line whereb...
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| Format: | Thèse |
| Langue: | anglais anglais |
| Publié: |
2021
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| Sujets: | |
| Accès en ligne: | http://eprints.utem.edu.my/id/eprint/26661/1/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf http://eprints.utem.edu.my/id/eprint/26661/2/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf |
Internet
http://eprints.utem.edu.my/id/eprint/26661/1/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdfhttp://eprints.utem.edu.my/id/eprint/26661/2/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf