Smart control sampling system for metrology tool in semiconductor production line

This research is to implement a Smart Control Sampling (SCS) system for metrology tool in the Semiconductor industry factory for better traceability and dynamic control on quality sampling for wire bond proces. Wire Bond process is one of the most critical process in the overall assembly line whereb...

詳細記述

書誌詳細

第一著者:	Tan, Cheerrein Cher Ring
フォーマット:	学位論文
言語:	英語 英語
出版事項:	2021
主題:	T Technology (General) TS Manufactures
オンライン･アクセス:	http://eprints.utem.edu.my/id/eprint/26661/1/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf http://eprints.utem.edu.my/id/eprint/26661/2/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf