Fabrication And Characterization Of O.5-Um Mosfet Bulk Silicon Technology On Thick Bonded Silicon-On-Insulator Substrate

The effect of thick film Silicon-On-Insulator (SOl) substrate on device fabrication and performance is studied. Enhancement-type Partially-Depleted SOl MOS device is fabricated on bonded SOl (BSOI) substrate based on bulk silicon MIMOS 0.5 um CMOS technology with full compatibility maintained. Th...

पूर्ण विवरण

ग्रंथसूची विवरण
मुख्य लेखक: Abdullah, Wan Fazlida Hanim
स्वरूप: थीसिस
भाषा:अंग्रेज़ी
अंग्रेज़ी
प्रकाशित: 2003
विषय:
Mosetenos
Silicon
ऑनलाइन पहुंच:http://psasir.upm.edu.my/id/eprint/12153/1/FK_2003_12.pdf

इंटरनेट

http://psasir.upm.edu.my/id/eprint/12153/1/FK_2003_12.pdf

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