Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication

Boron Steam is a process done after boron emitter diffusion for all PNP transistors and diodes. Boron emitter diffusion is a process to dope the emitter well with P-type dopant. The source of this dopant is in the form of liquid spun on the wafers and exposed to high temperatures. Boron steam is...

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Détails bibliographiques
Auteur principal:	Abd.Wahab, Kader Ibrahim
Format:	Thèse
Langue:	anglais anglais
Publié:	2003
Sujets:	Boron - Isotopes - Spectra Diffusion Transistor - Effect of radiation
Accès en ligne:	http://psasir.upm.edu.my/id/eprint/12163/1/FK_2003_22.pdf

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