Formation and characterization of rare earth oxides as high-K gate dielectrics on germanium substrate / Tahsin Ahmed Mozaffor Onik

In this study, Sm2O3/Ge and Ho2O3/Ge stack based metal oxide semiconductor (MOS) capacitors were prepared from radio frequency (RF) sputtered metallic Sm on Ge sub-strate and metallic Ho on Ge substrate followed by thermal oxidation/nitridation in N2O ambient. The effects of several oxidation/nitrid...

書目詳細資料
主要作者:	Tahsin Ahmed , Mozaffor Onik
格式:	Thesis
出版:	2022
主題:	TJ Mechanical engineering and machinery

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