Synthesis of stilbenes for potential application as photoacid generators in polymer film modification / Lee Jia Yin

Photo-acid generators (PAGs) are significant components for photolithography, required for polymer thin film modification in the semiconductor industry. Upon UV irradiation through a photomask, a PAG is photolysed liberating a photoacid that catalytically reacts with a photoresist polymeric matri...

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Auteur principal: Lee, Jia Yin
Format: Thèse
Publié: 2015
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