Synthesis of stilbenes for potential application as photoacid generators in polymer film modification / Lee Jia Yin
Photo-acid generators (PAGs) are significant components for photolithography, required for polymer thin film modification in the semiconductor industry. Upon UV irradiation through a photomask, a PAG is photolysed liberating a photoacid that catalytically reacts with a photoresist polymeric matri...
| 第一著者: | Lee, Jia Yin |
|---|---|
| フォーマット: | 学位論文 |
| 出版事項: |
2015
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| 主題: |
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類似資料
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