Reclamation of industry wastewater as a renewable source for cooling water system: A case study for a semiconductor plant / Yim Yan Han
Deionized water is generally used to rinse the integrated circuit (IC) crystal chips in semiconductor manufacturing. Wastewater generated in the semiconductor manufacturing need to be collected and treated as regulated by Department of Environment (DOE) Malaysia. On the other hand, cooling system...
| المؤلف الرئيسي: | |
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| التنسيق: | أطروحة |
| منشور في: |
2018
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