The Effect Of Implant Angle And Resist Shadowing In Submicron Implant Technology

Dengan adanya peningkatan teknologi bagi industri fabrikasi litar terkamil (IC) ke tahap 90nm dan seterusnya, masih terdapat isu yang perlu ditimbangkan untuk technologi yang lebih rendah (0.13μm dan 0.22μm). As the integrated circuit (IC) fabrication industry gears up to volume manufacturing of...

书目详细资料
主要作者:	Lee, Kang Hai
格式:	Thesis
语言:	英语
出版:	2006
主题:	R5-920 Medicine (General)
在线阅读:	http://eprints.usm.my/29274/

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