Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study

Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. Perkembangan pesat dalam bidang industri semikonduktor kini telah memerangsangkan teknik untuk mengoptimumkan penggunaan mesin-mesin dengan efektif s...

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Bibliographic Details
Main Author:	Siow, Yuen Tien
Format:	Thesis
Language:	English
Published:	2008
Subjects:	TJ1 Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/31210/
Abstract	Abstract here

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