Fabrication And Characterization Of Germanium, Zinc Oxide And Their Compounds By Thermal Evaporation Technique - Jumidali, Mohd Muzafa (2015)
Tujuan utama kajian ini adalah bagi mengkaji mekanisma pertumbuhan struktur germanium, zink oksida dan sebatiannya melalui kaedah peruapan terma yang mudah dan berkos rendah. Keduanya, bagi memfabrikasi dan menyiasat potensi struktur yang terpilih untuk aplikasi penderiaan. Dalam bahagian pertama kerja ini, penumbuhan struktur unik germanium oksida (GeO2) bersaiz zarah tanpa pemangkin telah dikaji. Kesan oksigen dalam pembentukan struktur GeO2 telah dikaji dan sifat-sifat struktur dan optik serta mekanisme pertumbuhan wap-pepejal (VS) telah disiasat dan dicadangkan. Didapati GeO2 bersaiz zarah menggunakan oksigen (O2) daripada persekitaran mempunyai ciri-ciri yang hampir sama sepertimana juga keputusan diperolehi dengan membekalkan aliran O2 daripada sumber luar. Selain itu, pulau-pulau germanium seragam (GIs) telah ditumbuhkan di atas substrat Si menggunakan nikel (Ni) sebagai pemangkin. This work mainly aims to study the growth mechanism of germanium (Ge), zinc oxide (ZnO), and their compounds through simple and low-cost thermal evaporation. Potential structures were also fabricated and investigated for sensor applications. In the first part, germanium oxide (GeO2) was grown using a novel one-step method without catalyst. The effect of oxygen (O2) supply in structure formation and the structural and optical properties of GeO2 were investigated, and the vapor–solid growth mechanism was proposed. The particle size of GeO2 grown using ambient O2 was similar to that obtained with a fixed O2 flow from an external source. Uniform-sized Ge islands (GIs) were also grown on a Si substrate with Ni catalyst.