Effect Of Nanosecond Laser Dicing On Ultrathin Silicon Die With Copper Stabilization Layer

Die ultra-nipis memerlukan satu lapisan kuprum (Cu) penstabilan di belakangnya untuk menghalang ledingan dan retakan semasa proses pengimpalan die serta penyambungan dawai. Pemotongan wafer silikon (Si) dengan lapisan Cu di belakangnya sangat mencabar. Pemotongan dengan bilah secara mekanikal akan m...

書目詳細資料
主要作者:	Marks, Michael Raj
格式:	Thesis
語言:	英语
出版:	2016
主題:	QC1 Physics (General)
在線閱讀:	http://eprints.usm.my/32200/
Abstract	Abstract here

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