SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analys...
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| 格式: | Thesis |
| 語言: | 英语 |
| 出版: |
2011
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| 在線閱讀: | http://eprints.usm.my/41933/ |
| 總結: | In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as
structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analysis (FEA) has been carried out for SU-8 piezoresistive microcantilever under the surface stress loading to help in improving the piezoresistive strain when designing the cantilever sensor. The analysis result concluded that the SU-8 cantilevers for chemical sensing should have lower length to width (L/W) ratio for higher
piezoresistive strain. |
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