SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analys...
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| Format: | Thèse |
| Langue: | anglais |
| Publié: |
2011
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| Accès en ligne: | http://eprints.usm.my/41933/ |
| _version_ | 1846216314106937344 |
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| author | Lee, Kok Siong |
| author_facet | Lee, Kok Siong |
| author_sort | Lee, Kok Siong |
| description | In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as
structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analysis (FEA) has been carried out for SU-8 piezoresistive microcantilever under the surface stress loading to help in improving the piezoresistive strain when designing the cantilever sensor. The analysis result concluded that the SU-8 cantilevers for chemical sensing should have lower length to width (L/W) ratio for higher
piezoresistive strain. |
| first_indexed | 2025-10-17T08:18:01Z |
| format | Thesis |
| id | usm-41933 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2025-10-17T08:18:01Z |
| publishDate | 2011 |
| record_format | eprints |
| spelling | usm-419332019-04-12T05:26:37Z http://eprints.usm.my/41933/ SU-8 Piezoresistive Microcantilever For Chemical Sensing Application Lee, Kok Siong QD1-999 Chemistry In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analysis (FEA) has been carried out for SU-8 piezoresistive microcantilever under the surface stress loading to help in improving the piezoresistive strain when designing the cantilever sensor. The analysis result concluded that the SU-8 cantilevers for chemical sensing should have lower length to width (L/W) ratio for higher piezoresistive strain. 2011-05 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/41933/1/LEE_KOK_SIONG.pdf Lee, Kok Siong (2011) SU-8 Piezoresistive Microcantilever For Chemical Sensing Application. Masters thesis, Universiti Sains Malaysia. |
| spellingShingle | QD1-999 Chemistry Lee, Kok Siong SU-8 Piezoresistive Microcantilever For Chemical Sensing Application |
| title | SU-8 Piezoresistive Microcantilever For Chemical Sensing
Application
|
| title_full | SU-8 Piezoresistive Microcantilever For Chemical Sensing
Application
|
| title_fullStr | SU-8 Piezoresistive Microcantilever For Chemical Sensing
Application
|
| title_full_unstemmed | SU-8 Piezoresistive Microcantilever For Chemical Sensing
Application
|
| title_short | SU-8 Piezoresistive Microcantilever For Chemical Sensing
Application
|
| title_sort | su 8 piezoresistive microcantilever for chemical sensing application |
| topic | QD1-999 Chemistry |
| url | http://eprints.usm.my/41933/ |
| work_keys_str_mv | AT leekoksiong su8piezoresistivemicrocantileverforchemicalsensingapplication |