Development Of Tetragonal Zirconia Thin Film For Semiconductor Application

In this work, the YSZ and Nb-YSZ film were produced by using chemical solution deposition (CSD) technique via dip coating. The films were deposited on two different substrates (silica glass and Si wafer). Various parameters were conducted in this study including numbers of coatings, concentration of...

書目詳細資料
主要作者:	Chan, Pooi Quan
格式:	Thesis
語言:	英语
出版:	2011
主題:	TN1-997 Mining engineering. Metallurgy
在線閱讀:	http://eprints.usm.my/43232/

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