Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment

Thin film Zr on Si and SiC were formed by sputtering. The films then underwent simultaneous oxidation and nitridation in N2O. The effects of oxidation/nitridation durations (5 20 min) and temperatures (500 1100oC) on the sputtered Zr/Si system and the effects of oxidation/nitridation temperatures (...

Full description

Bibliographic Details
Main Author:	Wong, Yew Hoong
Format:	Thesis
Language:	English
Published:	2012
Subjects:	TN1-997 Mining engineering. Metallurgy
Online Access:	http://eprints.usm.my/44927/
Abstract	Abstract here

Similar Items

Growth And Physical Characterization Of Native Oxide Thin Film On N-Type Gallium Nitride Substrate By Ti-Iermal Oxidation In Nitrous Oxide Ambient
by: Oon, Hooi Shy
Published: (2013)

Fabrication And Characterization Of Embedded Gold Nanoparticles In Metal Contacts For Silicon And Silicon Carbide-Based Devices
by: Gorji, Mohammad Saleh
Published: (2014)

Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique
by: Quah, Hock Jin
Published: (2010)

Studies Of The Effect Of Post Deposition Annealing To The Ceo2 Thin Film On P-Type Silicon And N-Type Silicon Carbide Substrates
by: Chuah, Soo Kiet
Published: (2011)

Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
by: Jasni, Farah Anis
Published: (2009)

Formation of zro2 thin films by thermal oxidation of sputtered zr on si and sic substrates [TN1-997].
by: Tedi, Kurniawan
Published: (2009)

Silicon Nanoparticles Synthesized Via Microemulsion With Various Parameters
by: Liong , Wai Lap
Published: (2011)

Anodization Of Zirconium For The Formation Of High-K Dielectric Zirconia (Zro2) Thin Film
by: Abidin, Noor Rehan Zainal
Published: (2011)

The Effect Of Surface Modification Of Multi-Walled Carbon Nanotubes On Properties Of Silicone Rubber Composites
by: Chua , Tze Ping
Published: (2010)

Studies On The Processing And Properties Of Conductive Single Fillers And Hybrid Fillers Filled Silicone Elastomer Composites
by: Kong, Kenneth Thean Soon
Published: (2012)

Effect of growth temperature and catalyst on the formation of one-dimensional silicon nanostructures via thermal evaporation technique.
by: Adnan, Mohd Azam Mohd
Published: (2011)

Synthesis And Optimization Of Copper Oxide As P-Type Transparent Conducting Oxide
by: Jani, Nur Aimi
Published: (2010)

Synthesis And Characterization Of Hydroxyapatite (Ha) And Silicon Substituted Hydroxyapatite (Si-Ha) Produced By A Precipitation Method [Tn1997]
by: LE, THI BANG
Published: (2009)

Effect Of Tetramethylammonium Hydroxide (TMAH) Etchant On The Formation Of Silicon Nanowires Transistor Patterned By Atomic Force Microscopy (AFM) Lithography
by: Lew, Kam Chung
Published: (2011)

Optimization Of Potassium Hydroxide (KOH) Etching On The Fabrication Of P-Type Silicon Nanowire Transistor Patterned By Atomic Force Microscopy Lithography
by: Abdullah, Ahmad Makarimi
Published: (2012)

Formation Of Nanotubular Oxide By Anodization Of Valve Metals
by: Ismail, Syahriza
Published: (2013)

The Effect Of Oxidation Treatment Of MWCNT On The Properties Of PDMS Nanocomposite
by: Mazlan, Norkhairunnisa
Published: (2012)

Synthesis And Characterization Of Fe-Doped Zinc Oxide Rods
by: Abd Aziz, Siti Nor Qurratu Aini
Published: (2014)

Development Of SiO2 On 4H-SiC By Direct Thermal Oxidation And Post Oxidation Annealing In HNO3 & H2O Vapour
by: Banu , Poobalan
Published: (2014)

Processing, Microstructure And Properties Of In Situ Copper Reinforced Tungsten Carbide Nanostructured Composite
by: Yusoff, Mahani
Published: (2012)

Synthesis And Characterization Of Gel Polymer Electrolyte And Zinc Oxide For Photoelectrochemical Cell
by: Alias, Siti Salwa
Published: (2011)

Fabrication And Characterisation Of Copper Composites Reinforced With Transition Metal Carbides Via Mechanical Alloying
by: Subhi, Nur Hawadah Mohd
Published: (2011)

Preparation Of In-Situ Carbides Reinforced Hybrid Copper-Based Composite By Mechanical Alloying And Its Characterization
by: Le , Minh Hai
Published: (2010)

Effect Of Nb, Cr And W On The High Temperature Oxidation Behavior Of Ti-Al Alloys
by: Sapiai, Napisah
Published: (2011)

Mechanical And Tribological Properties Of Ultra High Molecular Weight Polyethylene With Zinc Oxide Antibacterial Agent For Joint Implant
by: Chang, Boon Peng
Published: (2014)

Effect Of Lanthanum Oxide (La2O3) Addition On The Properties Of Calcium Copper Titanate (CaCu3Ti4O12)
by: Sharif, Nur Shafiza Afzan
Published: (2010)

Antimicrobial And Antioxidant Activities Of Orthosiphon Stamineus Benth. With Emphasis On Rosmarinic Acid Content
by: Ho , Chun Hoong
Published: (2011)

Preparation And Characterization Of Waterborne Acrylic Latex Polymers Pressure-Sensitive Adhesives
by: Yew, Fang Wey
Published: (2011)

The effect of silicon carbide (SiC) on physical and mechanical properties of recycled aluminium chip AA6061
by: Ab Kadir, Muhammad Irfan
Published: (2018)

Tree-based contrast subspace mining method
by: Florence Sia Fui Sze
Published: (2020)

Synthesis Of Single-Wall Carbon Nanotube Via CVD Growth Mechanism
by: Liu, Wei Wen
Published: (2011)

Physical And Electromagnetic Properties Of Tm And Gd Substituted Mg-Mn Ferrites
by: Lwin, Nilar
Published: (2013)

Preparation, Characterization And Properties Of Degradable Linear Low Density Polyethylene/Soya Powder Blends
by: Sam, Sung Ting
Published: (2011)

Role And Correlation Of Synthesis, Size And Morphology To The Magnetic Properties Of Cobalt And Cobalt/Gold Bimetallic Hierarchical Nanostructures
by: Khe, Cheng Seong
Published: (2013)

The Uv-Shielding Property Of Zr0.7ce0.3o2-Kaolinite/Exfoliated Kaolinite Composites Prepared By Differentsynthesis Methods
by: Nallis, Kry
Published: (2013)

Characterization and properties of linear low density polyethylene/poly(vinyl alcohol) blends.
by: Nordin, Razif Muhammed
Published: (2011)

Preparation and characterization of collagen grafted poly(dimethyl siloxane) modified films for skin substitute applications.
by: Darvishi, Seyed Mahmood Rezaei
Published: (2011)

Preparation and characterizations of poly (L-lactic acid) (plla) blends plla scaffold.
by: Vannaladsaysy, Vilay
Published: (2011)

Erosion And Sediment Yield Evaluation In Regards Of Erosion Sediment Control Practices (Escp)
by: Ismail, Siti Isma Hani
Published: (2010)

Kesan Penambahan CaCO3 Terhadap Ciri Licau Hablur ZnO
by: Jamaludin, Abdul Rashid
Published: (2011)