Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment

Thin film Zr on Si and SiC were formed by sputtering. The films then underwent simultaneous oxidation and nitridation in N2O. The effects of oxidation/nitridation durations (5 20 min) and temperatures (500 1100oC) on the sputtered Zr/Si system and the effects of oxidation/nitridation temperatures (...

وصف كامل

التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Wong, Yew Hoong
التنسيق:	أطروحة
اللغة:	الإنجليزية
منشور في:	2012
الموضوعات:	TN1-997 Mining engineering. Metallurgy
الوصول للمادة أونلاين:	http://eprints.usm.my/44927/

مواد مشابهة

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Studies Of The Effect Of Post Deposition Annealing To The Ceo2 Thin Film On P-Type Silicon And N-Type Silicon Carbide Substrates
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Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
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Formation of zro2 thin films by thermal oxidation of sputtered zr on si and sic substrates [TN1-997].
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Silicon Nanoparticles Synthesized Via Microemulsion With Various Parameters
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Anodization Of Zirconium For The Formation Of High-K Dielectric Zirconia (Zro2) Thin Film
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Studies On The Processing And Properties Of Conductive Single Fillers And Hybrid Fillers Filled Silicone Elastomer Composites
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Effect of growth temperature and catalyst on the formation of one-dimensional silicon nanostructures via thermal evaporation technique.
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Synthesis And Optimization Of Copper Oxide As P-Type Transparent Conducting Oxide
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Effect Of Tetramethylammonium Hydroxide (TMAH) Etchant On The Formation Of Silicon Nanowires Transistor Patterned By Atomic Force Microscopy (AFM) Lithography
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Synthesis And Characterization Of Hydroxyapatite (Ha) And Silicon Substituted Hydroxyapatite (Si-Ha) Produced By A Precipitation Method [Tn1997]
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Optimization Of Potassium Hydroxide (KOH) Etching On The Fabrication Of P-Type Silicon Nanowire Transistor Patterned By Atomic Force Microscopy Lithography
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Formation Of Nanotubular Oxide By Anodization Of Valve Metals
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The Effect Of Oxidation Treatment Of MWCNT On The Properties Of PDMS Nanocomposite
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Synthesis And Characterization Of Fe-Doped Zinc Oxide Rods
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Processing, Microstructure And Properties Of In Situ Copper Reinforced Tungsten Carbide Nanostructured Composite
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Development Of SiO2 On 4H-SiC By Direct Thermal Oxidation And Post Oxidation Annealing In HNO3 & H2O Vapour
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Fabrication And Characterisation Of Copper Composites Reinforced With Transition Metal Carbides Via Mechanical Alloying
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Synthesis And Characterization Of Gel Polymer Electrolyte And Zinc Oxide For Photoelectrochemical Cell
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Preparation Of In-Situ Carbides Reinforced Hybrid Copper-Based Composite By Mechanical Alloying And Its Characterization
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Effect Of Nb, Cr And W On The High Temperature Oxidation Behavior Of Ti-Al Alloys
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Mechanical And Tribological Properties Of Ultra High Molecular Weight Polyethylene With Zinc Oxide Antibacterial Agent For Joint Implant
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Effect Of Lanthanum Oxide (La2O3) Addition On The Properties Of Calcium Copper Titanate (CaCu3Ti4O12)
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Antimicrobial And Antioxidant Activities Of Orthosiphon Stamineus Benth. With Emphasis On Rosmarinic Acid Content
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Preparation And Characterization Of Waterborne Acrylic Latex Polymers Pressure-Sensitive Adhesives
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Turning modified titanium with AL2O3 coated cemented carbide (WIDIA DCMT 11304)
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Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
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Development Of Zirconia Nanotubes And Iron Oxide Nanopores By Anodization Method For Photoactive Material
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Effect Of Lead-free Solder And Gold Content On The Shear Strength, Toughness, IMC And Void Formation [TT267. C518 2004 f rb Kejuruteraan] [Microfiche 7715].
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Equal Channel Angular Pressing (ECAP) Process Of Copper Electrodes For Resistance Spot Brazing Application.
حسب: Thien Ly, Tran Thi
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Synthesis And Characterization Of Zeolites From Sodium Aluminosilicate Solution
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منشور في: (2007)

Microwave Assisted Processing Of Zr-Doped CaCu3Ti4O12 Electroceramics
حسب: Mohd Sharifuddin, Mohd Syahril
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The Influence Of Equal Channel Angular Pressing Angles On The Microstructure And Properties Of Al-Si-Mg Alloy
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Fabrikasi Dan Penganodan Komposit Matriks Aluminium Diperbuat Daripada Serbuk Aluminium Berbentuk Kepingan Dan Gentian Pendek Alumina Saffil Tm
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Mechanical and environmental properties of denture base poly (METHYL METHACRYLATE) FILLED BY BARIUM TITANATE
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Characterization And Properties Of Styrene Butadiene Rubber/Recycled Acrylonitrilebutadiene Rubber (SBR/NBRr) Blends
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Preparation And Properties Of Rubber Seed Shell Flour (RSSF)- Filled Polypropylene (PP) Composites
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