Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis

Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling a...

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Bibliographic Details
Main Author:	Harun, Muhammad Syakir
Format:	Thesis
Language:	English
Published:	2013
Subjects:	TJ1-1570 Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/46067/
Abstract	Abstract here

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