Gallium Nitride (Gan) Based Gas Sensor Using Catalytic Metal

In this work, Pt, Pd, Ag and Ni were deposited on p type and n type of GaN and AIGaN as catalytic metals contact using sputtering system through meta! mask to detect N2, H2 and CH4 gases with different concentrations and different metal thicknesses with a range of SO-300nm. Samples were annealed...

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