Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.

Bibliographic Details
Main Author:	Aw, Kean Chin
Format:	Thesis
Language:	English
Published:	2002
Subjects:	QC Physics
Online Access:	http://eprints.usm.my/5568/
Abstract	Abstract here

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Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

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