Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the...
| 第一著者: | |
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| フォーマット: | 学位論文 |
| 言語: | 英語 |
| 出版事項: |
2022
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| 主題: | |
| オンライン･アクセス: | http://eprints.usm.my/59671/ |
| Abstract | Abstract here |
| _version_ | 1855630305287733248 |
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| author | Kasim, Nabihah |
| author_facet | Kasim, Nabihah |
| author_sort | Kasim, Nabihah |
| description | This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the film. |
| first_indexed | 2025-10-17T08:46:49Z |
| format | Thesis |
| id | usm-59671 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2025-10-17T08:46:49Z |
| publishDate | 2022 |
| record_format | EPrints |
| record_pdf | Restricted |
| spelling | usm-596712023-12-13T03:25:33Z http://eprints.usm.my/59671/ Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate Kasim, Nabihah TK Electrical Engineering. Electronics. Nuclear Engineering This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the film. 2022-09 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/59671/1/Pages%20from%20NABIHAH%20BINTI%20KASIM%20-%20TESIS%20cut.pdf Kasim, Nabihah (2022) Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate. PhD thesis, Universiti Sains Malaysia. |
| spellingShingle | TK Electrical Engineering. Electronics. Nuclear Engineering Kasim, Nabihah Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate |
| thesis_level | PhD |
| title | Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate |
| title_full | Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate |
| title_fullStr | Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate |
| title_full_unstemmed | Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate |
| title_short | Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate |
| title_sort | deposition and characterisation of solution processed indium gallium zinc oxide thin film on silicon substrate |
| topic | TK Electrical Engineering. Electronics. Nuclear Engineering |
| url | http://eprints.usm.my/59671/ |
| work_keys_str_mv | AT kasimnabihah depositionandcharacterisationofsolutionprocessedindiumgalliumzincoxidethinfilmonsiliconsubstrate |