Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate

This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the...

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Bibliographic Details
Main Author:	Kasim, Nabihah
Format:	Thesis
Language:	English
Published:	2022
Subjects:	TK Electrical Engineering. Electronics. Nuclear Engineering
Online Access:	http://eprints.usm.my/59671/
Abstract	Abstract here

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