Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate
This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the...
| المؤلف الرئيسي: | |
|---|---|
| التنسيق: | أطروحة |
| اللغة: | الإنجليزية |
| منشور في: |
2022
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| الموضوعات: | |
| الوصول للمادة أونلاين: | http://eprints.usm.my/59671/ |
| Abstract | Abstract here |