Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate

This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the...

全面介紹

書目詳細資料

主要作者:	Kasim, Nabihah
格式:	Thesis
語言:	英语
出版:	2022
主題:	TK Electrical Engineering. Electronics. Nuclear Engineering
在線閱讀:	http://eprints.usm.my/59671/
Abstract	Abstract here