Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].
Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolith...
| المؤلف الرئيسي: | |
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| التنسيق: | أطروحة |
| اللغة: | الإنجليزية |
| منشور في: |
2008
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| الموضوعات: | |
| الوصول للمادة أونلاين: | http://eprints.usm.my/9613/ |
| Abstract | Abstract here |
| الملخص: | Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography.
The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolithography
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