Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].
Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolith...
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| Format: | Thesis |
| Language: | English |
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2008
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| Online Access: | http://eprints.usm.my/9613/ |
| Abstract | Abstract here |
| _version_ | 1855631275676663808 |
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| author | Siow, Yuen Tien |
| author_facet | Siow, Yuen Tien |
| author_sort | Siow, Yuen Tien |
| description | Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography.
The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolithography
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| first_indexed | 2025-10-17T07:54:21Z |
| format | Thesis |
| id | usm-9613 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2025-10-17T07:54:21Z |
| publishDate | 2008 |
| record_format | EPrints |
| record_pdf | Restricted |
| spelling | usm-96132017-04-17T09:26:35Z http://eprints.usm.my/9613/ Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. Siow, Yuen Tien TR925-1050 Photomechanical processes Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolithography 2008-11 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/9613/1/CYCLE_TIME_ANALYSIS_FOR_PHOTOLITHOGRAPHY_TOOLS_IN.pdf Siow, Yuen Tien (2008) Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. Masters thesis, Universiti Sains Malaysia. |
| spellingShingle | TR925-1050 Photomechanical processes Siow, Yuen Tien Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. |
| thesis_level | Master |
| title | Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. |
| title_full | Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. |
| title_fullStr | Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. |
| title_full_unstemmed | Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. |
| title_short | Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. |
| title_sort | cycle time analysis for photolithography tools in semiconductor manufacturing industry with simulation model a case study tr940 s618 2008 f rb |
| topic | TR925-1050 Photomechanical processes |
| url | http://eprints.usm.my/9613/ |
| work_keys_str_mv | AT siowyuentien cycletimeanalysisforphotolithographytoolsinsemiconductormanufacturingindustrywithsimulationmodelacasestudytr940s6182008frb |