Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].

Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolith...

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Bibliographic Details
Main Author:	Siow, Yuen Tien
Format:	Thesis
Language:	English
Published:	2008
Subjects:	TR925-1050 Photomechanical processes
Online Access:	http://eprints.usm.my/9613/
Abstract	Abstract here

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