Hanizam , H. (2013). Effect of in SITU DC and PDC substrate bias cleaning process on TiN coating adhesion in PVD system.
Chicagoスタイル(17版)引用形式Hanizam , Hashim. Effect of in SITU DC and PDC Substrate Bias Cleaning Process on TiN Coating Adhesion in PVD System. 2013.
MLA(9版)引用形式Hanizam , Hashim. Effect of in SITU DC and PDC Substrate Bias Cleaning Process on TiN Coating Adhesion in PVD System. 2013.
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