Smart control sampling system for metrology tool in semiconductor production line

This research is to implement a Smart Control Sampling (SCS) system for metrology tool in the Semiconductor industry factory for better traceability and dynamic control on quality sampling for wire bond proces. Wire Bond process is one of the most critical process in the overall assembly line whereb...

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Bibliographic Details
Main Author:	Tan, Cheerrein Cher Ring
Format:	Thesis
Language:	English English
Published:	2021
Subjects:	T Technology (General) TS Manufactures
Online Access:	http://eprints.utem.edu.my/id/eprint/26661/ https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=121752
Abstract	Abstract here

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