Smart control sampling system for metrology tool in semiconductor production line

This research is to implement a Smart Control Sampling (SCS) system for metrology tool in the Semiconductor industry factory for better traceability and dynamic control on quality sampling for wire bond proces. Wire Bond process is one of the most critical process in the overall assembly line whereb...

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Détails bibliographiques
Auteur principal:	Tan, Cheerrein Cher Ring
Format:	Thèse
Langue:	anglais anglais
Publié:	2021
Sujets:	T Technology (General) TS Manufactures
Accès en ligne:	http://eprints.utem.edu.my/id/eprint/26661/ https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=121752
Abstract	Abstract here

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