The morphology and structural properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition

The growth and characterization of silicon carbide (SiC) quantum dots (QDs) are reported in this work. The SiC QDs were grown using plasma enhanced chemical vapour deposition (PECVD) at 150 MHz radio frequency (RF). A mixture of silane (SiH4) and methane (CH4) with a ratio of 1:4 and diluted in hydr...

書目詳細資料
主要作者:	Abd. Karim, Nur Farah Nadia
格式:	Thesis
語言:	英语
出版:	2019
主題:	Q Science (General)
在線閱讀:	http://eprints.utm.my/102203/1/NurFarahNadiaMFS2019.pdf

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