The morphology and structural properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition

The growth and characterization of silicon carbide (SiC) quantum dots (QDs) are reported in this work. The SiC QDs were grown using plasma enhanced chemical vapour deposition (PECVD) at 150 MHz radio frequency (RF). A mixture of silane (SiH4) and methane (CH4) with a ratio of 1:4 and diluted in hydr...

书目详细资料
主要作者:	Abd. Karim, Nur Farah Nadia
格式:	Thesis
语言:	英语
出版:	2019
主题:	Q Science (General)
在线阅读:	http://eprints.utm.my/102203/1/NurFarahNadiaMFS2019.pdf

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