Silicon self-assembled nanodots fabricated using a radio-frequency magnetron sputtering method

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Silicon nanodot is a promising nanostructured material for future single-electron devices in nanoelectronic system. The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process. The scope of study co...

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Détails bibliographiques
Auteur principal:	Lim, Qiao Jie
Format:	Thèse
Langue:	anglais
Publié:	2008
Sujets:	QC Physics
Accès en ligne:	http://eprints.utm.my/11349/1/LimQiaoJieMFS2008.pdf

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