Silicon self-assembled nanodots fabricated using a radio-frequency magnetron sputtering method

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Silicon nanodot is a promising nanostructured material for future single-electron devices in nanoelectronic system. The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process. The scope of study co...

書誌詳細
第一著者:	Lim, Qiao Jie
フォーマット:	学位論文
言語:	英語
出版事項:	2008
主題:	QC Physics
オンライン･アクセス:	http://eprints.utm.my/11349/1/LimQiaoJieMFS2008.pdf

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