Silicon self-assembled nanodots fabricated using a radio-frequency magnetron sputtering method
Silicon nanodot is a promising nanostructured material for future single-electron devices in nanoelectronic system. The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process. The scope of study co...
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| Format: | Thèse |
| Langue: | anglais |
| Publié: |
2008
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| Accès en ligne: | http://eprints.utm.my/11349/1/LimQiaoJieMFS2008.pdf |