Conduction mechanisms in diamond-like carbon thin films prepared by PECVD method

The aim of this study is to prepare thin films of diamond-like carbon (a-C:H) and to determine the conduction mechanisms in the diamond-like carbon thin films. Diamond-like carbon (a-C:H) thin films were deposited on corning glass substrates using PECVD method. The samples were fabricated in Al/a-C:...

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Bibliographic Details

Main Author:	Ab. Kaderld, Mohd. Azamnie
Format:	Thesis
Language:	English
Published:	2010
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/16336/1/MohdAzamnieAbdMFSA2010.pdf