Surface roughness and infra-red study of diamond-like carbon thin films

Diamond-like-carbon (DLC) thin films were prepared on silicon and glass substrates using direct current – plasma enhanced chemical vapour deposition (DC-PECVD) from a mixture of methane, hydrogen, and argon. Two sets of samples are successfully deposited with different substrate temperatures varied...

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Bibliographic Details

Main Author:	Roslan, Bibi Aishah
Format:	Thesis
Language:	English
Published:	2010
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/16719/7/BibiAishahRoslanMFSA2010.pdf