Re-crystallization of metallized silicon wafer with copper film by Q-switched Nd : YAG laser
The polycrystalline thin copper films on semiconductor substrates are of interest for many semiconductor devices. Hence the aim of this research is to recrystallize copper silicon thin film. In order to achieve this objective, the Q-switched Nd:YAG laser was employed as a source to re-crystallize th...
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| フォーマット: | 学位論文 |
| 言語: | 英語 |
| 出版事項: |
2012
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| 主題: | |
| オンライン･アクセス: | http://eprints.utm.my/33741/2/FatoumaMilladAhmedAlegailyMFS2012.pdf |