Time dependence of morphological and optical properties of DC sputtering grown copper oxide thin film
Copper oxide thin films with five different deposition times (30 min, 60 min, 90 min, 120 min and 150 min) had been successfully growth by dc sputtering technique. The thickness of copper oxide thin film was measured by using ellipsometer. The optical properties of copper oxide thin films were chara...
| 第一著者: | |
|---|---|
| フォーマット: | 学位論文 |
| 言語: | 英語 |
| 出版事項: |
2014
|
| 主題: | |
| オンライン・アクセス: | http://eprints.utm.my/47972/25/RosmaizatulAkmaSulaimanMFS2014.pdf |