Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique

Semiconducting copper oxide (CuO) thin films have been deposited using DC sputtering technique using copper (Cu) target for detection of oxidizing nitrogen dioxide (NO2) gas. A series of CuO thin films (gas sensors) (C1-C7) of various thicknesses had been prepared on Corning glass substrate. The tim...

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Détails bibliographiques
Auteur principal: Mohd. Sukri, Nurul Ain
Format: Thèse
Langue:anglais
Publié: 2014
Sujets:
Accès en ligne:http://eprints.utm.my/48924/25/NurulAinMohdMFS2014.pdf

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