Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique

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Semiconducting copper oxide (CuO) thin films have been deposited using DC sputtering technique using copper (Cu) target for detection of oxidizing nitrogen dioxide (NO2) gas. A series of CuO thin films (gas sensors) (C1-C7) of various thicknesses had been prepared on Corning glass substrate. The tim...

書目詳細資料
主要作者:	Mohd. Sukri, Nurul Ain
格式:	Thesis
語言:	英语
出版:	2014
主題:	QC Physics
在線閱讀:	http://eprints.utm.my/48924/25/NurulAinMohdMFS2014.pdf

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