Structural properties of hydrogenated amorphous silicon (A-SI:H) thin film grown via radio frequency plasma enhanced chemical vapor deposition (RF PECVD)

An investigation of the structural properties of hydrogenated amorphous silicon (a-Si:H) thin films prepared by plasma enhanced chemical vapour deposition of silane (SiH4) was done using a combination of atomic force microscopy (AFM), photoluminescence, infrared and UV spectroscopy. Films were prepa...

पूर्ण विवरण

ग्रंथसूची विवरण
मुख्य लेखक:	Anthony Hasbi, Hasbullah
स्वरूप:	थीसिस
भाषा:	अंग्रेज़ी
प्रकाशित:	2005
विषय:	QC Physics
ऑनलाइन पहुंच:	http://eprints.utm.my/5093/1/HasbullahAnthonyHasbiMFS2005.pdf

समान संसाधन

The structural and optical properties of hydrogenated amorphous carbon (a-C:H) thin films deposited using a direct current-plasma enhanced chemical vapour deposition (DC-PECVD) technique
द्वारा: Abu Bakar, Suriani
प्रकाशित: (2005)

Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD
द्वारा: Tarjudin, Nurul Aini
प्रकाशित: (2012)

Characterization of amorphous silicon-carbon alloy films (a-Si:C:H)
द्वारा: Lau, Chen Chen
प्रकाशित: (2005)

Study Of Gan Low Dimensional Structures On Silicon Substrates Grown By Thermal Vapor Deposition For Photodiode And Solar Cell Applications
द्वारा: Abdelrahman, Kamaleldin Mohamed Abdalla
प्रकाशित: (2014)

Phase change analysis of crystalline silicon thin film grown by very high frequency - plasma enhanced chemical vapour deposition and radio frequency - magnetron sputtering
द्वारा: Rosman, Nor Hariz Kadir
प्रकाशित: (2020)

RF-MBE Grown III-Nitrides Heterostructures For Hydrogen Gas Sensing Applications
द्वारा: CHIN, CHE WOEI
प्रकाशित: (2017)

Amorphous carbon thin films by aerosol-assisted chemical vapor deposition for carbon-based solar cell applications / Nurfadzilah Ahmad
द्वारा: Ahmad, Nurfadzilah
प्रकाशित: (2015)

Optimization of vhf-pecvd deposition parameters for silicon carbide film using in-situ and in-line gas phase analysis
द्वारा: Azali, Muhamad Muizzudin
प्रकाशित: (2022)

Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition
द्वारा: Jusoh, Haezah Munyati
प्रकाशित: (2020)

The morphology and structural properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition
द्वारा: Abd. Karim, Nur Farah Nadia
प्रकाशित: (2019)

Structural and optical properties of carbon nanowalls by plasma-enhanced chemical vapor deposition method
द्वारा: Subari, Noor Fariza
प्रकाशित: (2015)

Structure and electrical properties of gallium arsenide nanowires grown by metal organic chemical vapor deposition
द्वारा: Muhammad, Rosnita
प्रकाशित: (2011)

Synthesis and characterization of zinc oxide/copper oxide/core-shell heterojunction nanowires grown by vapor deposition
द्वारा: Khan, Muhammad Arif
प्रकाशित: (2017)

Synthesis and characterization of zinc oxide/copper oxide core-shell heterojunction nanowires grown by vapor deposition
द्वारा: Khan, Muhammad Arif
प्रकाशित: (2017)

Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
द्वारा: Awang Sh'ri, Dayangku Noorfazidah
प्रकाशित: (2009)

Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
द्वारा: Dayangku Noorfazidah, Awang Sh'ri
प्रकाशित: (2009)

Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
द्वारा: Hasanudin, Muhammad Akmal
प्रकाशित: (2015)

Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
द्वारा: Ong, Wai Kit
प्रकाशित: (2015)

Surface modification of thin film nanocomposite membranes using plasma enhanced chemical vapor deposition method for desalination process
द्वारा: Khoo, Ying Siew
प्रकाशित: (2021)

Effect Of Hydrogen Flow Rate On The Quality Of Carbon Nanotubes Produced Using The Floating Catalyst Chemical Vapor Deposition Method
द्वारा: Raja Othman, Raja Nor Izawati
प्रकाशित: (2007)

Effects of hydrogen flowrate on carbon nanotube production at low temperature via floating catalyst chemical vapor deposition method
द्वारा: Zadeh, Elmira Habashi
प्रकाशित: (2014)

Development of very high frequency plasma enhanced chemical vapour deposition for nanostructure silicon carbide thin film deposition
द्वारा: Omar, Muhammad Firdaus
प्रकाशित: (2016)

UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
द्वारा: Ab. Rahman, Nur Alifah
प्रकाशित: (2010)

Low-temperature growth of nitrogen-doped nanocrystalline graphene films by cold-wall plasma assisted chemical vapor deposition for gas sensor application
द्वारा: Zainal Ariffin, Nur Hamizah
प्रकाशित: (2022)

Deposition and characterization of polycrystalline diamond coated on silicon nitride and tungsten carbide using microwave plasma assisted chemical vapour deposition technique
द्वारा: Agung Purniawan, Agung Purniawan
प्रकाशित: (2008)

Synthesis And Characterization Of Zno Nanostructures Using Physical Vapor Deposition And Electrochemical Deposition For Optoelectronic Applications
द्वारा: Hassan, Nadim Khalid
प्रकाशित: (2013)

Iodine doping of amorphous carbon thin films deposited using camphoric carbon precursor / Dayana Kamaruzaman
द्वारा: Kamaruzaman, Dayana
प्रकाशित: (2013)

GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications
द्वारा: Sheikh Sarmast, Hadi Mahmodi
प्रकाशित: (2017)

Fabrication And Characterization Of Gan Grown On Cubic Si (100) And Gaas (001) Substrates
द्वारा: Mohmad Zaini, Siti Nurul Waheeda
प्रकाशित: (2015)

Synthesis of carbon nanomaterials using chemical vapor deposition technique for liquid adsorption
द्वारा: Abdul Halif, Norzilah
प्रकाशित: (2011)

Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques
द्वारा: Azali, Muhamad Muizzudin
प्रकाशित: (2022)

Low-temperature growth of polycrystalline si thin film using RF magnetron sputtering / Shaiful Bakhtiar Hashim
द्वारा: Hashim, Shaiful Bakhtiar
प्रकाशित: (2014)

Study of III-nitrides heterostructures grown by plasma-assisted molecular beam epitaxy (PAMBE)
द्वारा: Chin, Che Woei
प्रकाशित: (2009)

Characterization Of Ti/TiN/AlCu Film Stack Prepared By Physical Vapor Deposition
द्वारा: Leow, Mun Tyng
प्रकाशित: (2012)

Physicochemical properties and growth kinetics of multilayer graphene by chemical vapor deposition for gas sensing application
द्वारा: Muslim, May Ali
प्रकाशित: (2017)

Fluidized bed chemical vapor deposition synthesis of carbon nanotubes and its application for cellulase immobilization
द्वारा: Danafar, Firoozeh
प्रकाशित: (2010)

Low-temperature synthesis of carbon nanotubes via floating catalyst-chemical vapor deposition method
द्वारा: Atiyah, Mahmood Rashid
प्रकाशित: (2010)

Gallium nitride nanowire by nitridation of electrochemically grown gallium oxide on silicon
द्वारा: Mohd. Ghazali, Norizzawati
प्रकाशित: (2015)

Physical characteristics of plasma monopole antenna constructed through rf charging of different gases / Nur Aina Halili
द्वारा: Halili, Nur Aina
प्रकाशित: (2015)

Investigation Of Adhesion Between Microwave Plasma Treated Epoxy And Silicone
द्वारा: Choong, Lai Fan
प्रकाशित: (2020)