Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD

A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of CH4 and H2. Morphology and structural properties of the grown nanostructure were investigated by means of microscopic...

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Bibliographic Details

Main Author:	Hasanudin, Muhammad Akmal
Format:	Thesis
Language:	English
Published:	2015
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/54011/25/MuhammadAkmalHasanudinMFS2015.pdf