Carbon removal of mold sample by femtosecond laser

Clean mold tool is important in large scale production of high quality integrated circuit chip. Conventional mold tool cleaning techniques often involve chemicals as cleaning agent which is costly and polluting process hence light is suggested as a non-chemical agent alternative. High intensity ligh...

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Détails bibliographiques
Auteur principal:	Abu Bakar, Mohamad Aizat
Format:	Thèse
Langue:	anglais
Publié:	2018
Sujets:	QC Physics
Accès en ligne:	http://eprints.utm.my/81127/1/MohamadAizatAbuMFS2018.pdf

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