Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique

Silicon nitride based planar waveguides play an important role in biosensing applications. Conventional fabrication of silicon nitride waveguides utilizes the chemical vapor deposition (CVD) technologies. Silicon nitride waveguide abrication through magnetron sputtering is still unexplored and a few...

وصف كامل

التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Majeed, Uzair
التنسيق:	أطروحة
اللغة:	الإنجليزية الإنجليزية الإنجليزية
منشور في:	2016
الموضوعات:	TP200-248 Chemicals: Manufacture, use, etc.
الوصول للمادة أونلاين:	http://eprints.uthm.edu.my/812/
Abstract	Abstract here

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