Mitigation of oxygen presence in AlN (100) & (002) growth using RF magnetron sputtering

Aluminium nitride (AlN) nucleation layer (NL) is a useful nitride semiconductor for the growth of Gallium Nitride (GaN) on silicon. Major issues related to the fabrication of AlN films are on its crystallographic orientations and high processing temperatures. In order to fabricate AlN NL at low temp...

Full description

Bibliographic Details
Main Author:	Bakri, Anis Suhaili
Format:	Thesis
Language:	English English English
Published:	2022
Subjects:	TP Chemical technology
Online Access:	http://eprints.uthm.edu.my/8399/
Abstract	Abstract here

Similar Items

Aluminium nitride (AlN) as buffer layer for deposition of gallium nitride (GaN) thin films on silicon substrates using magnetron sputtering technique
by: Tahan, Muliana
Published: (2021)

RF magnetron sputtered YSZ thin films: fabrication and characterization
by: Shahrul Razi bin Meskon
Published: (2024)

Structural and optical properties of RF-sputtered Ge thin films using magnetron sputtering technique
by: Ariffin, Nurul Assikin
Published: (2018)

Fabrication of smart glass electrochromic device using rf magnetron sputtering
by: Abdullah, Siti Ashraf
Published: (2014)

GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications
by: Sheikh Sarmast, Hadi Mahmodi
Published: (2017)

Growth Of Gan Films On Gaas (100) Substrate By Rf-Sputtering And E-Beam Evaporation Techniques
by: Md Taib, Muhamad Ikram
Published: (2016)

Fabrication and characterization of doped zinc oxide thin films by RF magnetron sputter
by: Farah Lyana Shain
Published: (2017)

Low-temperature growth of polycrystalline si thin film using RF magnetron sputtering / Shaiful Bakhtiar Hashim
by: Hashim, Shaiful Bakhtiar
Published: (2014)

Magnetic Properties of Rf Magnetron Sputtered Co-Ag-Cu Granular Thin Films
by: Kabashi, Kabashi Khatir
Published: (2000)

Fabrication of titania-based memristive device using RF magnetron sputtering method / Aznilinda Zainuddin
by: Zainodin @ Zainuddin, Aznilinda
Published: (2014)

Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique
by: Majeed, Uzair
Published: (2016)

Giant Magnetoresistance of Silver Nickel Iron Grandular Magnetic Thin Films Prepared by RF Magnetron Sputtering System
by: Lim, Kean Pah
Published: (1998)

Synthesis and characterization of nanocrystalline silicon thin films on teflon substrates by RF magnetron sputtering / Norhidayatul Hikmee Mahzan
by: Hikmee Mahzan, Norhidayatul
Published: (2015)

Magnetoresistance of CuCoNi, CuCo and AlFeNi Granular Thin Films Prepared by RF Magnetron Sputtering
by: Yu, Ong Sing
Published: (2002)

Optimization of AlN/GaN strained-layer superlattice for GaN epitaxy on Si(111) substrate / Yusnizam Yusuf
by: Yusnizam, Yusuf
Published: (2017)

Structural characterization of yttria stabilized zirconia thin film deposited by magnetron sputtering
by: Nurhamizah Ahmad Rusli
Published: (2025)

Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application
by: Afzal, Naveed
Published: (2017)

Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering
by: Yusof, Ahmad Sauffi
Published: (2019)

Investigation on plasma properties for deposition of titanium nitride film using reactive magnetron sputtering system
by: Soo, Reh How
Published: (2018)

Silicon self - assembled nanodots fabricated using a radio - frequency magnetron sputtering method
by: Lim, Kheng Boo
Published: (2025)

Direct synthesis of ultra thin reduced graphene oxide film by radio frequency magnetron sputtering
by: Nor Shahira Md. Rudin
Published: (2025)

Electrochemical And Radio Frequency Sputtering Growth Of GaN Nanostructures On Porous Silicon
by: Shamsuddin, Siti Nur Atikah
Published: (2019)

Biocompatible and antibacterial silver tantalum oxide thin film by magnetron sputtering for surgical applications / Rodianah Alias
by: Rodianah , Alias
Published: (2019)

Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor
by: Bakri, Anis Suhaili
Published: (2017)

Optimization of titanium dioxide (TiO2) thin film using dip coating technique for oxygen gas sensor
by: Bakri, Anis Suhaili
Published: (2017)

Deposition of YTTRIA stabilized zirconia thin films by radio frequency magnetron sputtering for solid oxide fuel cell
by: Siti Nor Azlina Abd. Rashid
Published: (2025)

Structural and surface morphology of nanocystalline bismuth telluride thin films deposited using radio frequency magnetron sputtering
by: Emilly Albert Alim
Published: (2025)

Properties and optimization of TiN coating in Ti-51 at. %Ni, Ti-27at. %Nb and Ti-25at. %Ta alloys using magnetron sputtering for biomedical applications / Ishiaka Shaibu Arudi
by: Ishiaka Shaibu Arudi
Published: (2025)

Effect of nitrogen pressure on Ti /TiA1 coating on 304 stainless steel by PVD-DC magnetron sputtering
by: Mustafa Muneim Sabar
Published: (2025)

Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique
by: Zulhelmi Alif Abdul Halim
Published: (2025)

Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
by: Ahmadipour, Mohsen
Published: (2018)

Fabrication of chromium doped copper-zinc-tin-sulphide intermediate band solar cell by magnetron co-sputtering technique
by: Megat Mohd Izhar Sapeli (P83768)
Published: (2023)

Optical properties of zinc oxide thin films fabricated via radio frequency magnetron sputtering for optical hydrogen gas sensor application
by: Mustaffa, Siti Nor Aliffah
Published: (2017)

Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques
by: Muhamad Muizzudin Azali
Published: (2025)

Fabrication of copper-zinc-tin sulphide thin film solar cell by single quaternary compound target in radio frequency magnetron sputtering
by: Mohammad Tanvirul Ferdaous (P83767)
Published: (2023)

DC And RF Characterization Of n-GaN Schottky Diode For Microwave Application
by: Munir, Tariq
Published: (2011)

Corrosion inhibition behaviour of pyrrole and pyridine with the presence of oxygen scavenger / Ezan Suhailah Mohd Kassim
by: Mohd Kassim, Ezan Suhailah
Published: (2018)

Electrical Insulation Characteristics Of P Epdm Blends With Aln, Al2o3 And Rganoclay Nanofillers
by: Mansor, Noor Syazwani
Published: (2015)

Nanoscale Based Ti/Aln/Ti/Sio2 Multi-Layer Absorber Coatings For Solar Thermal Devices
by: Mutawalli, Bello
Published: (2022)

Rf-Mbe Growth Of Iii-Nitrides Heterostructures For Light Detecting Applications
by: Mohd Yusoff, Mohd Zaki
Published: (2016)