Characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device
Also available in printed version
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Master's thesis |
| Language: | English |
| Published: |
Universiti Teknologi Malaysia
2025
|
| Subjects: | |
| Online Access: | https://utmik.utm.my/handle/123456789/44502 |
| Abstract | Abstract here |
| _version_ | 1854934146298675200 |
|---|---|
| author | Aizzat Ayuni Mohad Idris |
| author2 | Mohd. Khairul Ahmad, supervisor |
| author_facet | Mohd. Khairul Ahmad, supervisor Aizzat Ayuni Mohad Idris |
| author_sort | Aizzat Ayuni Mohad Idris |
| description | Also available in printed version |
| format | Master's thesis |
| id | utm-123456789-44502 |
| institution | Universiti Teknologi Malaysia |
| language | English |
| publishDate | 2025 |
| publisher | Universiti Teknologi Malaysia |
| record_format | dspace |
| record_pdf | Abstract |
| spelling | utm-123456789-445022025-08-21T09:40:28Z Characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device Aizzat Ayuni Mohad Idris Mohd. Khairul Ahmad, supervisor Electrical engineering Also available in printed version Flexible electronics have great potential for various applications. Studies on flexible Surface Acoustic Wave (SAW) device have shown that the flexible SAW devic e has high sensitivity, stability, and reliability. The main construction of flexible SAW is consist of piezoelectric film and Interdigital Transducer (IDT). Since piezoelectric is important in flexible SAW device, it is crucial to ensure that the flexible piezoelectric substrate function as desired. Therefore, three deposition techniques are proposed to deposit the Zinc Oxide (ZnO) thin film on the flexible substrate. The deposition method are Spray Pyrolysis, Sol-gel and Radio frequency Sputtering. All the ZnO thin films are characterized and analysed using the field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), and Atomic-Force Microscopy (AFM). The results show that all three techniques have the capabilities to grow the pure ZnO thin film on the polyimide substrate. However, the RF Sputtering method gives a better quality of crystal compared to others. With high crystallographic axis orientation and good adhesion, the RF Sputtered ZnO thin film proceeds to be used as the piezoelectric based material. Then the silver IDT is deposited onto the thin film using the inkjet printing method. To observe the flexibility of IDTs, three different surface conditions which are convex, flat and concave with a different distance of IDTs are studied towards the resistor. For the flexible piezoelectric thin film, the voltage and frequency response are measured in three different surface conditions. This is to ensure the capabilities of the piezoelectric towards the flexibilities condition. Reflection (S11) and transmission (S21) of SAW device also are measured by using the Microwave Network Analyzer. The results show that the highest frequency response of this flexible SAW device is 10.74 MHz in convex or bent-in condition with the ZnO thin film thickness is 595.5 nm and wavelength (?) of IDT is 0.03 mm. The lowest frequency response of this flexible SAW device is 1.55 MHz in concave or bent-out condition for ? is 0.15 mm with 432.0 nm of ZnO film thickness. In conclusion, the flexible SAW device is functioning in the flexible conditions either in concave, flat and convex condition zainurin UTM 125 p. Thesis (Sarjana Kejuruteraan (Elektrik)) - - Universiti Teknologi Malaysia, 2018 2025-03-11T06:20:42Z 2025-03-11T06:20:42Z 2018 Master's thesis https://utmik.utm.my/handle/123456789/44502 vital:144795 valet-20211214-145143 ENG Closed Access UTM Complete Unpublished Completion application/pdf Universiti Teknologi Malaysia |
| spellingShingle | Electrical engineering Aizzat Ayuni Mohad Idris Characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device |
| thesis_level |
Master
|
| title | Characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device |
| title_full | Characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device |
| title_fullStr | Characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device |
| title_full_unstemmed | Characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device |
| title_short | Characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device |
| title_sort | characterization of zinc oxide thin film with interdigital transducer for flexible surface acoustic wave device |
| topic | Electrical engineering |
| url | https://utmik.utm.my/handle/123456789/44502 |
| work_keys_str_mv | AT aizzatayunimohadidris characterizationofzincoxidethinfilmwithinterdigitaltransducerforflexiblesurfaceacousticwavedevice |